Surface Analyzer Combining Secondary Ion Mass Spectrometry and Ion Scattering Spectrometry
نویسندگان
چکیده
منابع مشابه
Quantitative Secondary Ion Mass Spectrometry
mental standards, and by statistical and systematic errors in the measurement of x-ray lines and in the separation of line intensity from spectral background. The errors in estimating the characteristics of the detector system, with exception of deadtime effects, cancel when the emission from the specimen is divided by that from the standard. The estimate of achievable accuracy of EPMA and the ...
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ژورنال
عنوان ژورنال: Journal of the Mass Spectrometry Society of Japan
سال: 1976
ISSN: 1884-3271,1340-8097
DOI: 10.5702/massspec1953.24.261